Visible-ultraviolet spectroscopic ellipsometry of lead zirconate titanate thin films
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چکیده
منابع مشابه
Spectroscopic ellipsometry of metal phthalocyanine thin films.
Optical functions of cobalt phthalocyanine, nickel phthalocyanine (NiPc), and iron phthalocyanine (FePc) have been determined by use of spectroscopic ellipsometry in the spectral range 1.55-4.1 eV (300-800 nm). The samples were prepared by evaporation onto glass and silicon substrates. The optical functions were determined by point-to-point fit. Absorption spectra were also measured. The index-...
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Piezoelectric properties of three sol-gel derived Pb Zr0.53Ti0.47 O3 thin film specimens of different thicknesses integrated onto Pt/Ti/SiO2 Si substrates are investigated to delineate the influence of residual stress on the strain-field response characteristics from other thickness related effects. Residual tensile stresses are determined from wafer curvature measurements for films ranging in ...
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Lead zirconate titanate (Pb(1.1)(Zr(0.52)Ti(0.48))O(3)) thin films of thickness 260 nm on Pt/Ti/SiO(2)/Si substrates were densified by 2.45 GHz microwave annealing. The PZT thin films were annealed at various annealing temperatures from 400 to 700 °C for 30 min. X-ray diffraction showed that the pyrochlore phase was transformed to the perovskite phase at 450 °C and the film was fully crystalliz...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2005
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.1968432